Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (Q363712): Difference between revisions
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Property / DOI: 10.1007/s11012-010-9330-z / rank | |||
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Property / arXiv ID: 1012.1170 / rank | |||
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Property / cites work: Note on a Theorem of Bloch Concerning Possible Causes of Superconductivity / rank | |||
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Property / cites work: A modified Newton method for the solution of ill-conditioned systems of nonlinear equations with application to multiple shooting / rank | |||
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Property / cites work: Bruchbedingungen vom Mohrschen Typ für transversal isotrope Werkstoffe am Beispiel der Faser‐Kunststoff‐Verbunde / rank | |||
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Property / cites work: Generalized fluid equations for parallel transport in collisional to weakly collisional plasmas / rank | |||
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Latest revision as of 15:24, 9 December 2024
scientific article
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English | Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations |
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Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (English)
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5 September 2013
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PVD
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glow discharge
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surface coating
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plasma
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drift-diffusion
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