Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations

DOI10.1007/S11012-010-9330-ZzbMath1271.76394arXiv1012.1170OpenAlexW3098920315MaRDI QIDQ363712

Mohammad Hasan, M. Dambrine

Publication date: 5 September 2013

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1012.1170

zbMATH Keywords

plasmaglow dischargedrift-diffusionPVDsurface coating

Mathematics Subject Classification ID

Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

Uses Software

• COMSOL

Cites Work

• A modified Newton method for the solution of ill-conditioned systems of nonlinear equations with application to multiple shooting
• Generalized fluid equations for parallel transport in collisional to weakly collisional plasmas
• Bruchbedingungen vom Mohrschen Typ für transversal isotrope Werkstoffe am Beispiel der Faser‐Kunststoff‐Verbunde
• Note on a Theorem of Bloch Concerning Possible Causes of Superconductivity

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