Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations

DOI10.1007/s11012-010-9330-zzbMath1271.76394arXiv1012.1170MaRDI QIDQ363712

Mohammad Hasan, M. Dambrine

Publication date: 5 September 2013

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1012.1170

zbMATH Keywords

plasma; glow discharge; drift-diffusion; PVD; surface coating

Mathematics Subject Classification ID

76X05: Ionized gas flow in electromagnetic fields; plasmic flow

Uses Software

• COMSOL