A model for chemical-mechanical polishing of a material surface based on contact mechanics (Q597793): Difference between revisions
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| Property / DOI: 10.1016/j.jmps.2003.07.007 / rank | |||
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| Property / author: Joost J. Vlassak / rank | |||
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| Property / MaRDI profile type: MaRDI publication profile / rank | |||
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| Property / full work available at URL: https://doi.org/10.1016/j.jmps.2003.07.007 / rank | |||
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| Property / OpenAlex ID: W2046026222 / rank | |||
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| Property / cites work: Q3868933 / rank | |||
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| Property / cites work: Q4275389 / rank | |||
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| Property / cites work: Contact Mechanics / rank | |||
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| Property / DOI: 10.1016/J.JMPS.2003.07.007 / rank | |||
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Latest revision as of 21:50, 9 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A model for chemical-mechanical polishing of a material surface based on contact mechanics |
scientific article |
Statements
A model for chemical-mechanical polishing of a material surface based on contact mechanics (English)
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6 August 2004
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Wear and ablation
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Chemical mechanical polishing
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Contact mechanics
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