A model for chemical-mechanical polishing of a material surface based on contact mechanics

DOI10.1016/J.JMPS.2003.07.007zbMath1106.74337OpenAlexW2046026222MaRDI QIDQ597793

Joost J. Vlassak

Publication date: 6 August 2004

Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jmps.2003.07.007

zbMATH Keywords

Contact mechanicsChemical mechanical polishingWear and ablation

Mathematics Subject Classification ID

Contact in solid mechanics (74M15) Chemical structure in solid mechanics (74E40)

Cites Work

• Contact Mechanics
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