A model for chemical-mechanical polishing of a material surface based on contact mechanics
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Publication:597793
DOI10.1016/J.JMPS.2003.07.007zbMath1106.74337OpenAlexW2046026222MaRDI QIDQ597793
Publication date: 6 August 2004
Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.jmps.2003.07.007
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