Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (Q1877236): Difference between revisions

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Property / DOI: 10.1016/j.cam.2003.07.004 / rank
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Property / full work available at URL: https://doi.org/10.1016/j.cam.2003.07.004 / rank
 
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Property / cites work: PEERS: A new mixed finite element for plane elasticity / rank
 
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Property / cites work: Mixed and Hybrid Finite Element Methods / rank
 
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Property / cites work: Q3890207 / rank
 
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Property / cites work: Dual hybrid methods for the elasticity and the Stokes problems: A unified approach / rank
 
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Property / cites work: On modelling thermal oxidation of Silicon II: numerical aspects / rank
 
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Property / DOI: 10.1016/J.CAM.2003.07.004 / rank
 
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Latest revision as of 11:07, 16 December 2024

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Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors
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    Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (English)
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    16 August 2004
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    Dual-mixed finite elements
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    Hybrid finite elements
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    Thermal oxidation process
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    Semiconductor technology
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    Compressible and incompressible fluid mechanical problems
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