Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image (Q4310866): Difference between revisions

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Latest revision as of 15:16, 5 March 2024

scientific article; zbMATH DE number 681327
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English
Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image
scientific article; zbMATH DE number 681327

    Statements

    Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image (English)
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    5 March 1995
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    reconstruction of a semiconductor doping profile
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    laser-beam-induced current
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    algorithm
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    least squares formulation
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