A theory of pad conditioning for chemical-mechanical polishing (Q2567349): Difference between revisions
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Latest revision as of 11:21, 30 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A theory of pad conditioning for chemical-mechanical polishing |
scientific article |
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A theory of pad conditioning for chemical-mechanical polishing (English)
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4 October 2005
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abrasive wear
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surface-height probability density function
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integral equation
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