A theory of pad conditioning for chemical-mechanical polishing
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Publication:2567349
DOI10.1023/B:ENGI.0000042116.09084.00zbMath1073.74027OpenAlexW2108102614MaRDI QIDQ2567349
Peter R. Kramer, Leonard J. Borucki, Donald W. Schwendeman, Colin P. Please, Thomas P. Witelski
Publication date: 4 October 2005
Published in: Journal of Engineering Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1023/b:engi.0000042116.09084.00
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