A theory of pad conditioning for chemical-mechanical polishing (Q2567349)
From MaRDI portal
!
This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:
scientific article; zbMATH DE number 2211687
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | A theory of pad conditioning for chemical-mechanical polishing |
scientific article; zbMATH DE number 2211687 |
Statements
A theory of pad conditioning for chemical-mechanical polishing (English)
0 references
4 October 2005
0 references
abrasive wear
0 references
surface-height probability density function
0 references
integral equation
0 references
0.8640304207801819
0 references
0.8306482434272766
0 references
0.8017930388450623
0 references
0.7725695967674255
0 references
