Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (Q2688554): Difference between revisions
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| Property / author: Nikita F. Morozov / rank | |||
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| Property / author: D. A. Indejtsev / rank | |||
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| Property / author: Nikita F. Morozov / rank | |||
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| Property / author: D. A. Indejtsev / rank | |||
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| Property / full work available at URL: https://doi.org/10.1134/s1063454122040185 / rank | |||
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Latest revision as of 09:14, 30 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements |
scientific article |
Statements
Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (English)
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3 March 2023
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resonant accelerometer
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weakly coupled system
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modal localization
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resonance curve
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