Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements

DOI10.1134/S1063454122040185MaRDI QIDQ2688554zbMATH OpenOpenAlexFDO

Authors V. S. Igumnova, A. V. Lukin, I. A. Popov, L. V. Shtukin, N. F. Morozov, D. A. Indejtsev

Publication date 3 March 2023

Published in Vestnik St. Petersburg University. Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1134/s1063454122040185

zbMATH Keywords

resonant accelerometerweakly coupled systemresonance curvemodal localization

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10)

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Cited in

(6)

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• Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor
• Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
• Dynamic characteristics of a beam angular-rate sensor
• Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams
• Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements

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