Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
DOI10.1134/S1063454122040185OpenAlexW4312050373MaRDI QIDQ2688554FDOQ2688554
Authors: V. S. Igumnova, A. V. Lukin, I. A. Popov, L. V. Shtukin, N. F. Morozov, D. A. Indejtsev 
Publication date: 3 March 2023
Published in: Vestnik St. Petersburg University. Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1134/s1063454122040185
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- Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
- Dynamic characteristics of a beam angular-rate sensor
- Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams
- Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements
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