Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (Q2688554)
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scientific article; zbMATH DE number 7659225
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| English | Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements |
scientific article; zbMATH DE number 7659225 |
Statements
Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (English)
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3 March 2023
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resonant accelerometer
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weakly coupled system
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modal localization
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resonance curve
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0.9424372911453248
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0.8490176200866699
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0.7606053352355957
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0.7560783624649048
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