Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (Q2688554)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements |
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Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (English)
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3 March 2023
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resonant accelerometer
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weakly coupled system
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modal localization
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resonance curve
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