Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

DOI10.1007/S00707-023-03552-ZMaRDI QIDQ6132784zbMATH OpenOpenAlexWikidataFDO

Authors Mina Ghanbari, Ghader Rezazadeh, Vahid Moloudpour-Tolkani

Publication date 14 July 2023

Published in Acta Mechanica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s00707-023-03552-z

zbMATH Keywords

clamped-clamped porous microbeamlongitudinal vibrationprimary resonancesecondary resonancetransversal vibration

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10)

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Cites work

• Studying thin film damping in a micro-beam resonator based on non-classical theories

Cited in

(7)

• Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
• Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
• A computer experiment application to the design and optimization of a capacitive accelerometer
• Design and synthesis of wide tuning range variable comb drive MEMS capacitors
• A resonant micro accelerometer based on electrostatic stiffness variation
• scientific article; zbMATH DE number 2200765 (Why is no real title available?)
• Exploring gradual material rigidity degradation effects on the nonlinear coupled axial-transversal nonlinear response of a capacitive micro-beam

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