Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

DOI10.1007/S00707-023-03552-ZMaRDI QIDQ6132784zbMATH OpenOpenAlexWikidataFDO

Authors Mina Ghanbari, Ghader Rezazadeh, Vahid Moloudpour-Tolkani

Publication date 14 July 2023

Published in Acta Mechanica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s00707-023-03552-z

zbMATH Keywords

primary resonancelongitudinal vibrationsecondary resonancetransversal vibrationclamped-clamped porous microbeam

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10)

Recommendations

• Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
• Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
• Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams
• A resonant micro accelerometer based on electrostatic stiffness variation
• Nonlinear tuning of microresonators for dynamic range enhancement

Cites work

• Studying thin film damping in a micro-beam resonator based on non-classical theories

Cited in

(7)

• Exploring gradual material rigidity degradation effects on the nonlinear coupled axial-transversal nonlinear response of a capacitive micro-beam
• A resonant micro accelerometer based on electrostatic stiffness variation
• Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
• Design and synthesis of wide tuning range variable comb drive MEMS capacitors
• scientific article; zbMATH DE number 2200765 (Why is no real title available?)
• Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
• A computer experiment application to the design and optimization of a capacitive accelerometer

This page was built for publication: Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q6132784)