Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

DOI10.1007/S00707-023-03552-ZzbMATH Open1522.74045OpenAlexW4362634369WikidataQ123498043 ScholiaQ123498043MaRDI QIDQ6132784FDOQ6132784

Authors: Mina Ghanbari, Ghader Rezazadeh, Vahid Moloudpour-Tolkani 

Publication date: 14 July 2023

Published in: Acta Mechanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00707-023-03552-z

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zbMATH Keywords

primary resonancelongitudinal vibrationsecondary resonancetransversal vibrationclamped-clamped porous microbeam

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10)

Cites Work

• Studying thin film damping in a micro-beam resonator based on non-classical theories

Cited In (7)

• Exploring gradual material rigidity degradation effects on the nonlinear coupled axial-transversal nonlinear response of a capacitive micro-beam
• A resonant micro accelerometer based on electrostatic stiffness variation
• Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
• Design and synthesis of wide tuning range variable comb drive MEMS capacitors
• Title not available (Why is that?)
• Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
• A computer experiment application to the design and optimization of a capacitive accelerometer

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