Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor (Q2783754): Difference between revisions
From MaRDI portal
Created a new Item |
Set profile property. |
||
| (4 intermediate revisions by 3 users not shown) | |||
| Property / author | |||
| Property / author: Q161421 / rank | |||
| Property / author | |||
| Property / author: Hien T. Tran / rank | |||
| Property / author | |||
| Property / author: Harvey Thomas Banks / rank | |||
Normal rank | |||
| Property / author | |||
| Property / author: Hien T. Tran / rank | |||
Normal rank | |||
| Property / describes a project that uses | |||
| Property / describes a project that uses: MPSalsa / rank | |||
Normal rank | |||
| Property / MaRDI profile type | |||
| Property / MaRDI profile type: MaRDI publication profile / rank | |||
Normal rank | |||
| links / mardi / name | links / mardi / name | ||
Latest revision as of 08:29, 5 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor |
scientific article |
Statements
Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor (English)
0 references
17 April 2002
0 references
chemical vapor deposition
0 references
reduced order model
0 references
nonlinear feedback tracking control
0 references
nonlinear compensator
0 references
film growth
0 references
proper orthogonal decomposition
0 references
state-dependent Riccati equation
0 references
state estimator
0 references
