Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor
From MaRDI portal
Publication:2783754
DOI10.1137/S0036139901383280zbMath1005.93022MaRDI QIDQ2783754
Grace M. Kepler, Beeler, S. C., Hien T. Tran, Harvey Thomas Banks
Publication date: 17 April 2002
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
state-dependent Riccati equation; proper orthogonal decomposition; chemical vapor deposition; state estimator; reduced order model; nonlinear compensator; film growth; nonlinear feedback tracking control
93C20: Control/observation systems governed by partial differential equations
93C10: Nonlinear systems in control theory
93C95: Application models in control theory
93B11: System structure simplification
80A32: Chemically reacting flows
Related Items
Control for a Class of Second-Order Systems via a State-Dependent Riccati Equation Approach, Unnamed Item, An observer-based controller for nonlinear systems: a gain scheduling approach, Observer-based controller for discrete-time systems: a state dependent Riccati equation approach, A POD projection method for large-scale algebraic Riccati equations, A reduced-basis discretization method for chemical vapor deposition reactor simulation, Nonlinear feedback controllers and compensators: a state-dependent Riccati equation approach, Optimal Tracking for State-Dependent Coefficient Factorized Nonlinear Systems, Optimality of Balanced Proper Orthogonal Decomposition for Data Reconstruction
Uses Software
