Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor
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Publication:2783754
DOI10.1137/S0036139901383280zbMath1005.93022MaRDI QIDQ2783754
Grace M. Kepler, Beeler, S. C., Hien T. Tran, Harvey Thomas Banks
Publication date: 17 April 2002
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
state-dependent Riccati equation; proper orthogonal decomposition; chemical vapor deposition; state estimator; reduced order model; nonlinear compensator; film growth; nonlinear feedback tracking control
93C20: Control/observation systems governed by partial differential equations
93C10: Nonlinear systems in control theory
93C95: Application models in control theory
93B11: System structure simplification
80A32: Chemically reacting flows
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