Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor (Q2783754)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor |
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Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor (English)
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17 April 2002
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chemical vapor deposition
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reduced order model
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nonlinear feedback tracking control
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nonlinear compensator
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film growth
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proper orthogonal decomposition
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state-dependent Riccati equation
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state estimator
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