Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants (Q3163293): Difference between revisions
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Latest revision as of 08:37, 3 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants |
scientific article |
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Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants (English)
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25 October 2010
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semiconductor manufacturing
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capacity planning
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wafer fabrication
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capability
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