Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants

DOI10.1080/00207540902791793zbMath1197.90283OpenAlexW2114153514MaRDI QIDQ3163293

James C. Chen, Chia-Wen Chen

Publication date: 25 October 2010

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540902791793

zbMATH Keywords

semiconductor manufacturingcapacity planningcapabilitywafer fabrication

Mathematics Subject Classification ID

Production models (90B30) Case-oriented studies in operations research (90B90)

Related Items (1)

Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems

Cites Work

• A capacity allocation problem with integer side constraints
• A resource portfolio planning model using sampling-based stochastic programming and genetic algorithm
• A practical fab design procedure for wafer fabrication plants

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