Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants (Q3163293)
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scientific article; zbMATH DE number 5805175
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| English | Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants |
scientific article; zbMATH DE number 5805175 |
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Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants (English)
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25 October 2010
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semiconductor manufacturing
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capacity planning
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wafer fabrication
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capability
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0.7895137071609497
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0.7680425047874451
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0.7650142908096313
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0.7639026045799255
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