Tool capacity planning in semiconductor manufacturing. (Q1868817)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Tool capacity planning in semiconductor manufacturing. |
scientific article |
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Tool capacity planning in semiconductor manufacturing. (English)
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28 April 2003
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Production planning
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Semiconductor manufacturing
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Capacity planning
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Mathematical programming
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Lagrangean relaxation
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