Tool capacity planning for semiconductor fabrication facilities under demand uncertainty (Q1579490)
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scientific article; zbMATH DE number 1506720
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| English | Tool capacity planning for semiconductor fabrication facilities under demand uncertainty |
scientific article; zbMATH DE number 1506720 |
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Tool capacity planning for semiconductor fabrication facilities under demand uncertainty (English)
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3 June 2002
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demand scenarios
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semiconductor manufacturing
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strategic planning
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optimization
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heuristics
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0.8738391995429993
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0.8675289154052734
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0.8191643953323364
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0.7945027947425842
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