Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (Q1877236): Difference between revisions
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| Property / DOI: 10.1016/j.cam.2003.07.004 / rank | |||
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| Property / cites work: PEERS: A new mixed finite element for plane elasticity / rank | |||
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| Property / cites work: Mixed and Hybrid Finite Element Methods / rank | |||
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| Property / cites work: Q3890207 / rank | |||
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| Property / cites work: Dual hybrid methods for the elasticity and the Stokes problems: A unified approach / rank | |||
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| Property / cites work: On modelling thermal oxidation of Silicon II: numerical aspects / rank | |||
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| Property / DOI: 10.1016/J.CAM.2003.07.004 / rank | |||
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Latest revision as of 11:07, 16 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors |
scientific article |
Statements
Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (English)
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16 August 2004
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Dual-mixed finite elements
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Hybrid finite elements
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Thermal oxidation process
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Semiconductor technology
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Compressible and incompressible fluid mechanical problems
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