Modeling reactive magnetron sputtering: a survey of different modeling approaches (Q2220239): Difference between revisions
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Revision as of 10:11, 29 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling reactive magnetron sputtering: a survey of different modeling approaches |
scientific article |
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Modeling reactive magnetron sputtering: a survey of different modeling approaches (English)
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22 January 2021
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mathematical modeling
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parameter identification
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control theory
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computer simulation
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reactive magnetron sputtering
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