Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (Q1667756): Difference between revisions
From MaRDI portal
Created a new Item |
Added link to MaRDI item. |
||
| links / mardi / name | links / mardi / name | ||
Revision as of 04:46, 1 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers |
scientific article |
Statements
Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (English)
0 references
30 August 2018
0 references
dynamic response
0 references
micro and nano electromechanical systems
0 references
micro cantilevers
0 references
assembled micro cantilever probes (ACPs)
0 references
GDQM
0 references
GDQEM
0 references
