Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers

DOI10.1016/j.apm.2012.09.064zbMath1438.74115MaRDI QIDQ1667756

Peng Zhang

Publication date: 30 August 2018

Published in: Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.apm.2012.09.064

zbMATH Keywords

dynamic response; GDQM; assembled micro cantilever probes (ACPs); GDQEM; micro and nano electromechanical systems; micro cantilevers

Mathematics Subject Classification ID

74H45: Vibrations in dynamical problems in solid mechanics

74K20: Plates

74E05: Inhomogeneity in solid mechanics

74F05: Thermal effects in solid mechanics

74S99: Numerical and other methods in solid mechanics