Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers

DOI10.1016/J.APM.2012.09.064zbMath1438.74115OpenAlexW2082894933MaRDI QIDQ1667756

Peng Zhang

Publication date: 30 August 2018

Published in: Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.apm.2012.09.064

zbMATH Keywords

dynamic responseGDQMassembled micro cantilever probes (ACPs)GDQEMmicro and nano electromechanical systemsmicro cantilevers

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Plates (74K20) Inhomogeneity in solid mechanics (74E05) Thermal effects in solid mechanics (74F05) Numerical and other methods in solid mechanics (74S99)

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Cites Work

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• On the analysis of thick rectangular plates
• Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method

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