Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method

DOI10.1002/cnm.1043zbMath1152.78002MaRDI QIDQ5302284

Ming-Hung Hsu

Publication date: 6 January 2009

Published in: Communications in Numerical Methods in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/cnm.1043

zbMATH Keywords

electrostatic; differential quadrature method; pull-in; nanoelectromechanical system; nano-actuator; nanomechanical behavior

Mathematics Subject Classification ID

78M20: Finite difference methods applied to problems in optics and electromagnetic theory

78M10: Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory

78A55: Technical applications of optics and electromagnetic theory

78A30: Electro- and magnetostatics