Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method (Q5302284)
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scientific article; zbMATH DE number 5485968
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English | Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method |
scientific article; zbMATH DE number 5485968 |
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Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method (English)
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6 January 2009
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nanoelectromechanical system
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differential quadrature method
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nano-actuator
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pull-in
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electrostatic
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nanomechanical behavior
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