Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (Q1667756)
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scientific article; zbMATH DE number 6929740
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| English | Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers |
scientific article; zbMATH DE number 6929740 |
Statements
Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (English)
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30 August 2018
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dynamic response
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micro and nano electromechanical systems
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micro cantilevers
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assembled micro cantilever probes (ACPs)
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GDQM
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GDQEM
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0.7247083187103271
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0.7195408344268799
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0.7071367502212524
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0.7063837051391602
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