Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (Q999955): Difference between revisions
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Revision as of 01:52, 5 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in |
scientific article |
Statements
Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (English)
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4 February 2009
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electromechanical coupling
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finite element
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micro-systems
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dynamics
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pull-in
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