A model for chemical-mechanical polishing of a material surface based on contact mechanics (Q597793): Difference between revisions
From MaRDI portal
Changed an Item |
Set profile property. |
||
| Property / MaRDI profile type | |||
| Property / MaRDI profile type: Publication / rank | |||
Normal rank | |||
Revision as of 00:43, 5 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A model for chemical-mechanical polishing of a material surface based on contact mechanics |
scientific article |
Statements
A model for chemical-mechanical polishing of a material surface based on contact mechanics (English)
0 references
6 August 2004
0 references
Wear and ablation
0 references
Chemical mechanical polishing
0 references
Contact mechanics
0 references
