A continuum-based modeling of MEMS devices for estimating their resonant frequencies (Q2638133): Difference between revisions

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Revision as of 20:18, 19 March 2024

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A continuum-based modeling of MEMS devices for estimating their resonant frequencies
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    A continuum-based modeling of MEMS devices for estimating their resonant frequencies (English)
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    14 September 2010
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    electric stiffness
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    mesh motion
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    electric field
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    finite element method
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    total Lagrangian
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