Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films (Q2573672): Difference between revisions
From MaRDI portal
Set OpenAlex properties. |
Normalize DOI. |
||
| Property / DOI | |||
| Property / DOI: 10.1016/j.ijheatmasstransfer.2004.06.012 / rank | |||
| Property / DOI | |||
| Property / DOI: 10.1016/J.IJHEATMASSTRANSFER.2004.06.012 / rank | |||
Normal rank | |||
Latest revision as of 07:53, 19 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films |
scientific article |
Statements
Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films (English)
0 references
22 November 2005
0 references
Computer simulation
0 references
Fluid flows
0 references
Chemical vapor deposition processes
0 references
