Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (Q3298702): Difference between revisions
From MaRDI portal
Created a new Item |
Added link to MaRDI item. |
||
| links / mardi / name | links / mardi / name | ||
Revision as of 11:56, 4 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process |
scientific article |
Statements
Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (English)
0 references
15 July 2020
0 references
semiconductor manufacturing
0 references
data mining
0 references
decision tree
0 references
artificial neural network
0 references
Taguchi parameter design
0 references
