Q4342503 (Q4342503): Difference between revisions
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scientific article; zbMATH DE number 1024672
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| English | No label defined |
scientific article; zbMATH DE number 1024672 |
Statements
22 June 1997
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radiation therapy
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optical dosimeters
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microinstruments
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implantable fiber
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sensor-actuator technology
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LIGA technique
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lithography
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galvano-forming
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molding
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microactuator pile
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electrostatic micropump
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electrostatic micropositioner
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piezoelectric microatuators
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shape memory materials
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electro-rheological fluids
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acceleration micro-sensors
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temperature sensors
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