Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (Q400172): Difference between revisions
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS |
scientific article |
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Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (English)
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21 August 2014
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adhesion
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stiction
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experiments
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finite element method
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