Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (Q662795): Difference between revisions
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment |
scientific article |
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Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (English)
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24 February 2012
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sputtering
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Boltzmann kinetic equation
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