Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment

DOI10.3103/S1062873810020280zbMath1236.82065MaRDI QIDQ662795

V. V. Manukhin, M. K. Gubkin, A. A. Barat

Publication date: 24 February 2012

Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)

zbMATH Keywords

Boltzmann kinetic equation; sputtering

Mathematics Subject Classification ID

76P05: Rarefied gas flows, Boltzmann equation in fluid mechanics

82B24: Interface problems; diffusion-limited aggregation arising in equilibrium statistical mechanics

82D20: Statistical mechanics of solids

82D10: Statistical mechanics of plasmas

Cites Work

• New Approach to Low-Energy Potential Scattering