Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (Q662795)
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scientific article; zbMATH DE number 6009225
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| English | Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment |
scientific article; zbMATH DE number 6009225 |
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Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (English)
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24 February 2012
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sputtering
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Boltzmann kinetic equation
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0.6935361623764038
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0.6562575697898865
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0.6489824056625366
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