Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (Q2392192): Difference between revisions
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids |
scientific article |
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Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (English)
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1 August 2013
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microelectronics mechanical systems (MEMS)
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nanoelectronics mechanical systems (NEMS)
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exact solutions for the free vibrations of plates
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