Analysis of static charge induced pull-in of an electrostatic MEMS (Q2656050): Difference between revisions
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of static charge induced pull-in of an electrostatic MEMS |
scientific article |
Statements
Analysis of static charge induced pull-in of an electrostatic MEMS (English)
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10 March 2021
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cantilever
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charge induced pull-in
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clamped-clamped beam
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electrostatic actuation
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partial electrode actuation
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fixed-free beam
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static charge
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