Analysis of static charge induced pull-in of an electrostatic MEMS

DOI10.1016/J.CNSNS.2021.105690MaRDI QIDQ2656050zbMATH OpenOpenAlexFDO

Authors Mithlesh Kumar, Banibrata Mukherjee, Siddhartha Sen

Publication date 10 March 2021

Published in Communications in Nonlinear Science and Numerical Simulation (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cnsns.2021.105690

zbMATH Keywords

cantilevercharge induced pull-inclamped-clamped beamelectrostatic actuationfixed-free beampartial electrode actuationstatic charge

Mathematics Subject Classification ID

Electro- and magnetostatics (78A30) Technical applications of optics and electromagnetic theory (78A55) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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Cites work

• Dynamic analysis of a micro-resonator driven by electrostatic combs
• scientific article; zbMATH DE number 50659 (Why is no real title available?)

Cited in

(4)

• Nonlinear flexure mechanics of mixture unified gradient nanobeams
• Electrostatic fringes effect in systems with three charged parallel micro-beams
• Analysis of the effect of spatial uncertainties on the dynamic behavior of electrostatic microactuators
• On the static and dynamic response of electrostatic actuators

Describes a project that uses

Uses Software

• COMSOL

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