Analysis of static charge induced pull-in of an electrostatic MEMS (Q2656050)
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scientific article; zbMATH DE number 7319182
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| English | Analysis of static charge induced pull-in of an electrostatic MEMS |
scientific article; zbMATH DE number 7319182 |
Statements
Analysis of static charge induced pull-in of an electrostatic MEMS (English)
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10 March 2021
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cantilever
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charge induced pull-in
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clamped-clamped beam
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electrostatic actuation
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partial electrode actuation
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fixed-free beam
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static charge
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0.7891920208930969
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0.7755733132362366
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0.7750458717346191
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0.7639318108558655
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