The nonlinear electrostatic behavior for shaped electrode actuators (Q986238)

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scientific article; zbMATH DE number 5768733
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    The nonlinear electrostatic behavior for shaped electrode actuators
    scientific article; zbMATH DE number 5768733

      Statements

      The nonlinear electrostatic behavior for shaped electrode actuators (English)
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      11 August 2010
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      actuator
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      curved electrode
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      electrostatic
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      large deflection
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      MEMS
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      differential quadrature method
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