Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (Q2688554): Difference between revisions

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Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements
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    Nonlinear dynamics of a mode-localized MEMS accelerometer with beam sensing elements (English)
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    3 March 2023
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    resonant accelerometer
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    weakly coupled system
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    modal localization
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    resonance curve
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