Design framework for high-performance optimal sampled-data control with application to a wafer stage (Q5758317): Difference between revisions
From MaRDI portal
Created a new Item |
Changed an Item |
||
| Property / describes a project that uses | |||
| Property / describes a project that uses: Mu Analysis and Synthesis Toolbox / rank | |||
Normal rank | |||
Revision as of 03:28, 28 February 2024
scientific article; zbMATH DE number 5186149
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design framework for high-performance optimal sampled-data control with application to a wafer stage |
scientific article; zbMATH DE number 5186149 |
Statements
Design framework for high-performance optimal sampled-data control with application to a wafer stage (English)
0 references
3 September 2007
0 references
control design
0 references
high-performance sampled-data systems
0 references
system identification techniques
0 references
