Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (Q363712): Difference between revisions
From MaRDI portal
Added link to MaRDI item. |
Changed an Item |
||
| Property / describes a project that uses | |||
| Property / describes a project that uses: COMSOL / rank | |||
Normal rank | |||
Revision as of 17:03, 28 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations |
scientific article |
Statements
Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (English)
0 references
5 September 2013
0 references
PVD
0 references
glow discharge
0 references
surface coating
0 references
plasma
0 references
drift-diffusion
0 references
