A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (Q2484843): Difference between revisions
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Revision as of 07:18, 5 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology |
scientific article |
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A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (English)
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3 August 2005
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Dual mixed formulations
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Primal hybrid formulations
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Dual hybrid formulations
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