A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology
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Publication:2484843
DOI10.1016/j.cma.2004.02.004zbMath1068.76050OpenAlexW1997900136MaRDI QIDQ2484843
Paola Causin, Riccardo Sacco, Marco Restelli
Publication date: 3 August 2005
Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.cma.2004.02.004
Statistical mechanics of semiconductors (82D37) Finite element methods applied to problems in fluid mechanics (76M10) Reaction effects in flows (76V05)
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Cites Work
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