A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology

DOI10.1016/J.CMA.2004.02.004MaRDI QIDQ2484843zbMATH OpenOpenAlexFDO

Authors Paola Causin, Riccardo Sacco, Marco Restelli

Publication date 3 August 2005

Published in Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cma.2004.02.004

zbMATH Keywords

Dual hybrid formulationsDual mixed formulationsPrimal hybrid formulations

Mathematics Subject Classification ID

Finite element methods applied to problems in fluid mechanics (76M10) Reaction effects in flows (76V05) Statistical mechanics of semiconductors (82D37)

Recommendations

• Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors
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• Numerical simulation of thermal oxidation process in semiconductor devices using mixed-hybrid finite elements
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Cites work

• A family of higher order mixed finite element methods for plane elasticity
• A family of mixed finite elements for the elasticity problem
• A New Mixed Finite Element for the Stokes and Elasticity Problems
• Dual hybrid methods for the elasticity and the Stokes problems: A unified approach
• scientific article; zbMATH DE number 996051 (Why is no real title available?)
• scientific article; zbMATH DE number 2127780 (Why is no real title available?)
• scientific article; zbMATH DE number 4033243 (Why is no real title available?)
• scientific article; zbMATH DE number 4110040 (Why is no real title available?)
• scientific article; zbMATH DE number 3564235 (Why is no real title available?)
• scientific article; zbMATH DE number 3596197 (Why is no real title available?)
• Mixed and Hybrid Finite Element Methods
• Mixed and nonconforming finite element methods : implementation, postprocessing and error estimates
• On drilling degrees of freedom
• On modelling thermal oxidation of Silicon II: numerical aspects
• PEERS: A new mixed finite element for plane elasticity
• Primal Hybrid Finite Element Methods for 2nd Order Elliptic Equations
• Recent advances in models for thermal oxidation of silicon
• Some equilibrium finite element methods for two-dimensional elasticity problems
• The MATLAB ODE Suite

Cited in

(8)

• Numerical simulation of tethered buoy dynamics using mixed finite elements
• A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology
• Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors
• A stabilized dual mixed hybrid finite element method with Lagrange multipliers for three-dimensional elliptic problems with internal interfaces
• scientific article; zbMATH DE number 2127780 (Why is no real title available?)
• Numerical simulation of thermal oxidation process in semiconductor devices using mixed-hybrid finite elements
• A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography
• An integrated computer model for simulating electrothermomechanical interactions of an exhaust oxygen sensor.

Describes a project that uses

Uses Software

• ode23s
• Matlab
• Ode15s
• ode113
• MATLAB ODE suite
• ode23
• ode45

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