A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology

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Publication:2484843

DOI10.1016/j.cma.2004.02.004zbMath1068.76050OpenAlexW1997900136MaRDI QIDQ2484843

Paola Causin, Riccardo Sacco, Marco Restelli

Publication date: 3 August 2005

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cma.2004.02.004




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