A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (Q2484843)

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A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology
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    A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (English)
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    3 August 2005
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    Dual mixed formulations
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    Primal hybrid formulations
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    Dual hybrid formulations
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