Recent advances in models for thermal oxidation of silicon
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Cites work
- A class of mixed assumed strain methods and the method of incompatible modes
- A fast marching level set method for monotonically advancing fronts.
- A finite element method for crack growth without remeshing
- A globally convergent matrix-free algorithm for implicit time-marching schemes arising in finite element analysis in fluids
- A level set approach to a unified model for etching, deposition, and lithography. III: Redeposition, reemission, surface diffusion, and complex simulations
- A new finite element formulation for computational fluid dynamics. III: The generalized streamline operator for multidimensional advective- diffusive systems
- A new finite element formulation for computational fluid dynamics. VI. Convergence analysis of the generalized SUPG formulation for linear time- dependent multidimensional advective-diffusive systems
- A new finite element formulation for computational fluid dynamics. VIII. The Galerkin/least-squares method for advective-diffusive equations
- A non-conforming element for stress analysis
- An analysis of strong discontinuities in multiplicative finite strain plasticity and their relation with the numerical simulation of strain localization in solids
- CHOOSING BUBBLES FOR ADVECTION-DIFFUSION PROBLEMS
- Computational inelasticity
- Geometrically non-linear enhanced strain mixed methods and the method of incompatible modes
- Improved versions of assumed enhanced strain tri-linear elements for 3D finite deformation problems
- Modelling crack growth by level sets in the extended finite element method
- Multiscale phenomena: Green's functions, the Dirichlet-to-Neumann formulation, subgrid scale models, bubbles and the origins of stabilized methods
- Numerical schemes for the Hamilton-Jacobi and level set equations on triangulated domains
- On a fully three-dimensional finite-strain viscoelastic damage model: Formulation and computational aspects
- On modelling thermal oxidation of Silicon I: theory
- On modelling thermal oxidation of Silicon II: numerical aspects
- On the formulation of enhanced strain finite elements in finite deformations
- Streamline upwind/Petrov-Galerkin formulations for convection dominated flows with particular emphasis on the incompressible Navier-Stokes equations
- The patch test—a condition for assessing FEM convergence
- Variational and projection methods for the volume constraint in finite deformation elasto-plasticity
Cited in
(12)- Oxidation-induced stresses in the isolation oxidation of silicon
- Advances in the numerical treatment of grain-boundary migration: coupling with mass transport and mechanics
- A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology
- A numerical strategy for investigating the kinetic response of stimulus-responsive hydrogels
- Construction of an Asymptotic Model for the Oxidation Process of Silicon
- scientific article; zbMATH DE number 2021806 (Why is no real title available?)
- On modelling thermal oxidation of Silicon I: theory
- On modelling thermal oxidation of Silicon II: numerical aspects
- A mixture-compatible theory of chemothermal deposition and expansion in n-constituent finitely deforming composite materials with initially circularly cylindrical microstructures
- A modified Deal-Grove thermal oxidation model for silicon wafers
- Chemically induced swelling of hydrogels
- Coupling diffusion-reaction-mechanics model for oxidation
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